Parts and Services

Domestic Key Components

Development and production of semiconductor silicon, quartz, ceramic and metalmaterial equipment

components, mainly used in Epitaxy, thin film, etching, diffusion and other IC manufacturing processes


Active development of key components for domestically produced replacement equipment.

- Remote plasma source

- Radio frequency power supply


Robot and intelligent products


Committed to the development, design and manufacture of automation equipment, providing integrated

circuit manufacturing plants Comprehensive intelligent products and total system solutions。