Parts and Services

Domestic Key Components


Development and production of semiconductor silicon, quartz, ceramic and metalmaterial equipment

components, mainly used in Epitaxy, thin film, etching, diffusion and other IC manufacturing processes

 

Active development of key components for domestically produced replacement equipment.

- Remote plasma source

- Radio frequency power supply

 

Robot and intelligent products

 

Committed to the development, design and manufacture of automation equipment, providing integrated

circuit manufacturing plants Comprehensive intelligent products and total system solutions。